11. APEVA SE

Description and main tasks

APEVA SE is a new company (spun off from AIXTRON SE in 2017) focused on the OLED display industry. APEVA is a complete deposition system provider for the organic material layers within the OLED stack. APEVA operates its strategic organic vapor deposition technology (OVPD) out of its location in Herzogenrath, Germany. While the main market for such deposition equipment is seen in Asia, APEVA’s core deposition technology development, related work force and IP are in Germany. In its laboratory in Germany APEVA operates a Gen1-size OVPD cluster for organic device fabrication and a Gen8.5-size OVPD demonstrator.

Expertise related to the project

• Specification and identification of key experimental parameters of the OVPD process
• Development of OVPD deposition processes for OLED applications on the OVPD pilot line at APEVA • Assessment of specific physical parameters to be validated by the characterization and modelling
• Evaluation of OVPD deposition processes e.g. by RGA characterization of OVPD, ellipsometry, electrical characterization of deposited samples • Evaluation of gas dynamic simulations for OVPD • Optimization of OVPD OLED process parameters according to industrial requirements • Assessment of benefit of quality control for the OVPD process • Exploitation of results for larger substrate areas